All-reliable-condition ultraviolet lasers are already broadly Employed in the fields of mechanical flaw detection, lithography, micromachining and drugs for some great benefits of little quantity, extensive life, higher efficiency, superior beam quality, wide tuning and slender spectral line, and so forth. Using significant electricity close to-infrared coherent light-weight supply as the elemental frequency source depending on nonlinear tuning technological innovation, creating ultraviolet coherent radiation by multistage frequency conversion is regarded as a very important method to establish the ultraviolet coherent mild resource.
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Based on the proof-of-basic principle experiment, the conversion effectiveness of 23% implied the possibility of achieving higher-electricity at the next Stokes wavelength with the Raman laser. Should the pump laser of 1078 nm could be obtained at the average electric power of fifty W, the output power of its 2nd Stokes wavelength at 1512 nm might be over 10 W. The design in the Raman laser cavity must be optimized so as to steer clear of the problems in the M1 and diamond surface area.
For example, The present concave OC could get replaced by a aircraft mirror which could mitigate the facility density around the surface area of M1 and the diamond. What's more, utilizing significant destruction threshold coatings for M1 and diamond would also Increase the output electric power with none damages. Then, the NIR laser at the 2nd Stokes wavelength can be high enough, as well as its good beam excellent, to make the final DUV laser at 193 nm that has a substantial normal electric power.
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Each the 1040 nm and 1078 nm laser originate from just one dual-wavelength Yb-doped fiber laser. Each and every laser is amplified by stages of fiber amplifier and Yb-doped supplies amplifier, respectively.
On the other side, the ability scaling in the NIR laser is another element to boost the average power of the 193-nm DUV laser. Mainly because of the deficiency of the higher-ability amplification Option in the NIR laser (for example at 1553 nm), nonlinear frequency processes which include optical parameter oscillation (OPO) may be applied to produce a wavelength converter by shifting the wavelength from one μm to the desired wavelength together with getting relative greater electric power [21]. Lately, a diamond Raman laser showed its capability in achieving a large ability and a significant conversion effectiveness on the 1st Stokes of the 1-μm laser [22,23], which implies the likelihood to generally be used within the 193-nm DUV laser technology because of its large Raman obtain and huge frequency shift.
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Moreover, combining the reliable-point out laser with other nonlinear method which include stimulated Raman scattering, NIR lasers might be reached at new wavelengths with superior energy and substantial beam high-quality, which was analyzed by the proof-of-principle experiment. This Raman laser scheme offers a fresh route to the high-electrical power DUV laser, In particular within the wavelength of 193 nm.
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The conversion efficiency from basic NIR to DUV is from five% to 36% in accordance with the noted leads to Table 1. Increasing the conversion performance will lessen click here the burden on the look and setup of the fundamental laser amplifier along with the electrical electric power use. A fantastic beam quality of the basic laser will even contribute towards the increasing from the conversion effectiveness and also the suitable electricity intensity from the NIR and eco-friendly laser within the SHG and FHG course of action, respectively. The highest conversion efficiencies from NIR to environmentally friendly and green to DUV laser by utilization of CLBO crystal are 70% and all-around 50%, respectively [12], which corresponds for the conversion performance of 35% from essential to DUV.
The development of the 193-nm laser was shown by levels of SFG. In an effort to scale the DUV laser energy correctly, a fresh thought in the 193-nm DUV laser era is introduced according to the diamond Raman laser.
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